P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools SEMI S14-0521 (technical revision)

SEMI S14-0521 (technical revision)

The limit of detection is determined by either the BLANK value or by count rate limitations

This Standard does not recommend stopping reporting density parameters using industry traditional metrology based on determining the weight and geometry of the pads (‘geometric parameters’)

In the months leading up to the formation of the SEMI Data Path Task Force

optical characteristics (single transmittance

P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools SEMI S14-0521 (technical revision)This standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available