MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-1106 (Reapproved 1111) - Superseded SEMI E80-0299 (Reapproved 0915)

SEMI E80-0299 (Reapproved 0915)

The rinse test method evaluates performance in a flushing mode while the component is in a static state (no actively moving components within the component under test)

SEMI E99-1000E (editorial revision)

SEMI M31-0303 (technical revision)

originally published November 2004

MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-1106 (Reapproved 1111) - Superseded SEMI E80-0299 (Reapproved 0915)Dimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself. The method of illuminating the specimen affects the image content, including the appearance of edges which are used in defining the size of the specimen. This Practice includes adjusting the microscope for Kohler illumination, which provides uniform illumination of the specimen, reduces stray light, and