E14200 - SEMI E142 - 基板マッピングの仕様 StdTpc-Documentation/Training The Guide does not apply

The Guide does not apply to measurement systems used to control intermediate process steps during Si wafer manufacturing

SEMI D58-0310 (first published)

本スタンダードは，global Information & Control Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年3月にwww

org in November 2010

mask writing tools

E14200 - SEMI E142 - 基板マッピングの仕様 StdTpc-Documentation/Training The Guide does not applySEMI E142. 1, SEMI E142. 2, SEMI E142. 30211SEMI E142 Subordinate Standards (included) SEMI E142. 1 0211 XML SEMI E142. 2 0211 SECS II SEMI E142. 3 0211 Web Referenced SEMI Standards (purchase separately) SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communication and Control of Manufacturing Equipment (GEM) Event Data Collection and Dynamic Event Report Configuration SEMI E39 Object Services