P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components which control flow of ≤50

which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44

This Specification focuses on polymer material and component performance and validation

The purpose of the Guide is to avoid prolonged rinse-up of the new HPIX when it is loaded into ion exchange (polish) tanks

008 Ωcm and 0

org in March 2006

P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdTpc-Stainless Steel Components which control flow of ≤50This Standard specifies key requirements of fiducial marks that can be used as a coordinate system for referencing defect locations on extreme ultraviolet (EUV) blanks. This Standard is intended to set an appropriate level of technical specifications of mask fiducial marks, such as their locations, shapes, sizes, line dimensions, and limits of variation. The marks must be readable by mask metrology and pattern write tools. This Standard is not