TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Complete Inventory # CONJ-1906

Inventory # CONJ-1906

Inventory # 13344

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Flange: NW63 CF

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TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Complete Inventory # CONJ-1906TEL Tokyo Electron 5087 400487 15 Valve Assembly DEV. SOLUTION2 Lithius Complete Inventory # A 17664 Part No: 5087 400487 15 Model No: VALVE ASSY (2NDAMF) DEV. SOLUTION2 Develop Process Station, DEV ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Assembly Part No: 5087 400486 15, VALVE ASSY(AMF) 5004 400006 11 NUT(15A) (509510027011 1 5004 100010 11 JOINT (509510063511 1 5010 201961 12 BASE(AMF) 1 5010 402583 11 COVER 1