E19500 - SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components StdTpc-Wafer Shipping System The purpose of this Document

The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements

SEMI P44-0709 (technical revision)

dismantling

This test method was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee

This Document defines a test method for determining organic compounds on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components

E19500 - SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components StdTpc-Wafer Shipping System The purpose of this Document1 Purpose 1. 1 This Test Method describes a quantitative analysis method to measure the ISO 14644 9 surface cleanliness for particle concentration (SCP) of a critical chamber component (CCC) by means of an adhesive replacement substrate (ARS), which removes particles from the CCC surfaces of interest. The ARS is subsequently measured with a scanning surface inspection system (SSIS), typically a scatterometer, for particle counting, and with scanning