E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) Revision:SEMI E122-0217 - Superseded orgで，そして2008年7月にCD-ROMで入手可能となる。

orgで，そして2008年7月にCD-ROMで入手可能となる。

the specified edge width is used to determine the regions of the measured edge profile to be fitted and the coordinates of the reference point locations are derived from fitted regions of the measured edge profile

SEMI E88-0701 (technical revision)

or in an ad hoc request from the EDA Application

SEMI E30-0303 (technical revision)

E12200 - SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM) Revision:SEMI E122-0217 - Superseded orgで，そして2008年7月にCD-ROMで入手可能となる。This Standard establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this Standard is to facilitate the integration of testing equipment into an automated semiconductor factory. This Standard accomplishes this by defining an operational model for testing