D06300 - SEMI D63 - Test Method for Depolarization Effect of FPD Color Filter StdPbc-1020 microelectromechanical systems/nanoelectromechanical systems [MEMS/NEMS])

microelectromechanical systems/nanoelectromechanical systems [MEMS/NEMS])

to completely describe the ISPM as it appears from the network interface

• Identification of the major FGs within the scope of PCS

この文書の目的は，半導体製造装置の中で静電気電荷および電界に起因した生産性への悪影響を最小にすることである。本文書は，半導体製造に使われる装置が静電気的な両立性を確立するためのガイドである。半導体工場全体の静電気的な両立性は，SEMI E129に述べている。

• Reporting recipe execution and recipe step execution

D06300 - SEMI D63 - Test Method for Depolarization Effect of FPD Color Filter StdPbc-1020 microelectromechanical systems/nanoelectromechanical systems [MEMS/NEMS])This Standard establishes implementation practices for testing the depolarization effect of FPD color filters. These methods can be applied to manufacturing, quality control, and development work. This Standard specifies measuring methods. In this Standard, the depolarization effect of color filters is obtained by measuring the reduction in polarization efficiency when polarized light passes through color filters. Referenced SEMI Standards (purchase