E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework NOTICE: This document was balloted

NOTICE: This document was balloted and approved for withdrawal in 2003

SEMI G93-0412 (first published)

SEMI MF1530-0707 (technical revision)

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee

本スタンダードは，IC製造工場において300 mm径ウェーハの搬送および保管に使用されるFOUPを，部分的に規定する。

E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework NOTICE: This document was ballotedglobal Physical Interfaces & Carriers Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM19996200711 AMHS: automated material handling systemsFOUPAMHSPI O SEMI E23I O Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 Wafers SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E23 Specification for Cassette Transfer Parallel I O Interface SEMI E30 Generic