P03500 - SEMI P35 - マイクロリソグラフィメトロロジの用語法 StdPbc-1025 As long as management on

As long as management on this specification and above requirement is expected on an equipment

These standards include

Application of this procedure will simplify ATE comparisons

communications and services to realize the concept

The formats for data produced as a result of executing a data collection plan are also defined

P03500 - SEMI P35 - マイクロリソグラフィメトロロジの用語法 StdPbc-1025 As long as management onglobal Micropatterning Committeeglobal Audits and Reviews Subcommittee2006824200610www. semi. org 200611CD ROM2000220047 Referenced SEMI Standards SEMI E89 Guide for Measurement System Analysis (MSA) SEMI P28 Specification for Overlay Metrology Test Patterns for Integrated Circuit Manufacture