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M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 This Standard does not require

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This Standard does not require

photovoltaics (PVs)

SECS-IIは,アイテムとアイテムリストというもので,メッセージの構造を定義している。この構造により,メッセージを正しく解釈するために,データ形式をデータ自身で定義することができる。

A detailed list of the fundamental GEM requirements and additional GEM capabilities can be found in § 11

and test methods

M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 This Standard does not requireMaximum allowable slip and other non uniformly distributed defects are frequently specified when procuring polished and epitaxial silicon wafers. SEMI M62 specifies a maximum allowable fraction of the epitaxial wafer surface area that can contain slip. This Guide provides a design for and guidance for use of a wafer grid that facilitates the determination of the fraction of the wafer surface area covered by observed defects. This Guide defines a grid

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