E03005 - SEMI E30.5 - 計測装置の特定装置モデル Revision:SEMI E30.5-0302 - Superseded SEMI E142-0225 (technical revision)

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SEMI E142-0225 (technical revision)

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 5

本スタンダードは，global Assembly & Packaging Technical Committeeで技術的に承認されている。現版は2011年7月1日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年8月にwww

This Test Method defines the equipment and measurement procedure for visually detecting the surface defects of GaN epitaxial wafer for manufacturing high brightness LEDs

SEMI E10-0304E (editorial revision)

E03005 - SEMI E30.5 - 計測装置の特定装置モデル Revision:SEMI E30.5-0302 - Superseded SEMI E142-0225 (technical revision)global Information & Control Committee20071220global Audits and Reviews Subcommittee20082www. semi. org20083CD ROM20012002 1: SEMI E30 MSEMSEMMSEMSEMI E30 Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E37. 1 High Speed SECS Message Services Single Selected Session Mode (HSMS SS) SEMI E58 Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and

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