F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display Specification of data variables required

Specification of data variables required to communicate basic equipment performance data to the host computer

• Carrier transfers to/from production equipment internal buffer space

Specifications and analytical procedures are introduced for each type

1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。

support equipment

F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display Specification of data variables requiredSemiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags. This Specification defines the voltage sag immunity required for semiconductor processing, metrology, and automated test equipment. This Specification strikes a balance between voltage sag immunity and increased equipment cost. This Specification sets minimum