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G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdTpc-Photolithography Metrology This Specification is part of
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Description
This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network
They must implement environmental
Originally published July 2003
35-1109E (editorial revision)
this Test Method is suitable for use only with 2 mm thick
G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdTpc-Photolithography Metrology This Specification is part ofglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1994 : 1 ! VLSI 3. 2 Referenced SEMI Standards None.
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