MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-1107 (Reapproved 1023) - Current This Specification provides for a

This Specification provides for a smooth transition from existing traceability and labeling procedures to a comprehensive

SEMI F81-0624 (technical revision)

SEMI M43 — Guide for Reporting Wafer Nanotopography

SEMI E84-0701 (technical revision)

SEMI MF1366-0308 (technical revision)

MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-1107 (Reapproved 1023) - Current This Specification provides for aThis reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon. Because carbon may also reside in interstitial lattice positions when in concentrations near the solid solubility limit, the results of this Test Method may not be a measure of the total carbon concentration at such concentrations. The useful range of carbon concentration measurable by this Test Method is from the maximum amount of