C10500 - SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) Revision:SEMI C105-0923 - Current SEMI E37 — High-Speed SECS

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

どのデータ・アイテムがオプションで，どれが必須の仕様かは本文書の中で指定されない。

originally published March 2005

SEMI C44-0514 (technical revision)

and mechanical properties of FPD substrates

C10500 - SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) Revision:SEMI C105-0923 - Current SEMI E37 — High-Speed SECSPurpose The purpose of this Guide is to recommend procedures for trace iron analysis in high purity 2 propanol (IPA) needed by the semiconductor industry. Scope The scope of this Guide is the measurement of iron concentration in IPA, used in the semiconductor industry, with higher purity than Grade 4 IPA described in SEMI C41. The quantitative range of this method is 1 to 100 ppt. Instruments (bottles, etc.) for sampling IPA to be analyzed are