MRC Materials Research 63464553 SPUT 3 Shield Kit 200mm Eclipse Star Surplus This TEL Tokyo Electron 3381-000065-13

This TEL Tokyo Electron 3381-000065-13 Stage Base Board PCB is used working surplus

CE Marked This Sorensen SGA200/25E-1DAA Modular DC Power Supply is used working surplus

Otherwise the physical condition of the chassis is good and clean

2) This ASM Advanced Semiconductor Materials 02-19970-01 Motion Driver is used working surplus

img{max-width:100%} MKS Instruments LM69 Spectra Vacuum Controller Working Surplus

MRC Materials Research 63464553 SPUT 3 Shield Kit 200mm Eclipse Star Surplus This TEL Tokyo Electron 3381-000065-13MRC Materials Research 63464553 SPUT 3 Shield Kit 200mm Eclipse Star Surplus Part No: 63464553 Kit Includes: 1ea API 1123 SS PS Shield 1ea D1160051 SS Filler Ring 2ea D119451 SS Corner Shield 1ea D116374 SS Gate Valve 1ea D119223 SS Dark Spacer Ring 1ea D123466 D119348 SS Shield Spacer Ring 1ea D124736 S SS Shield Plenum 1ea D119118 SS Cathode Adapter Shield 1ea D114820 D119017 SS Door SPA Shield This MRC 63464553 Eclipse Star (SPUT 3) Shield Kit