P01100 - SEMI P11 - アルカリ現像溶液に対する全規定度の測定のテスト方法 StdPbc-0124 Resistivity is a primary quantity

Resistivity is a primary quantity for characterization and specification of material used for semiconductor electronic devices

SEMI MF533-02a (first SEMI publication)

1  This Specification may be applied to equipment that is compliant to SEMI E30 (GEM)

This Standard covers the typical applications of ellipsometry

The process induced defects consist of chips/indents (surface and edge) and cracks (not to mention the surface itself)

P01100 - SEMI P11 - アルカリ現像溶液に対する全規定度の測定のテスト方法 StdPbc-0124 Resistivity is a primary quantityNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Liquid Chemicals Committee20071220global Audits and Reviews Subcommittee20082www. semi. org199119979 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not