F04800 - SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials StdTpc-Gases - Specialty SEMI E82-1102 (technical revision)

SEMI E82-1102 (technical revision)

SEMI E126-0305 (technical revision)

org in July 2006

form a complete Interoperability Specification for the ISPM

SEMI 3D10-0814 (Reapproved 1025)

F04800 - SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials StdTpc-Gases - Specialty SEMI E82-1102 (technical revision)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Test Method provides a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials. 2 Scope 2. 1 Following digestion by dry ashing (DDA) or digestion in closed vessel