P00300 - SEMI P3 - レジスト付きクロムブランク StdPbc-1011 previously published July 2003

previously published July 2003

This Document describes the procedure for determination of the moisture dry-down characteristics (quantity of removable moisture) of surface mount (integrated gas delivery systems) and conventional gas delivery systems using cavity ring down spectroscopy (CRDS) analyzers

This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor/Actuator Network

It is recommended to use only high purity accelerator

The number and size of these grains vary significantly depending on the crystallization method and the wafer’s position in the ingot

P00300 - SEMI P3 - レジスト付きクロムブランク StdPbc-1011 previously published July 2003NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2008118global Audits and Reviews Subcommittee20082www. semi. org1998 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.