MF008400 - SEMI MF84 - Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe Revision:SEMI MF84-1105 - Superseded its internal buffer space

its internal buffer space

SEMI S13 — Environmental

The Standard is structured so that new FGs can be added to the Standard through future balloting

3  This Test Method can be used for process control

This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard

MF008400 - SEMI MF84 - Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe Revision:SEMI MF84-1105 - Superseded its internal buffer spaceThis Test Method covers the measurement of the resistivity of silicon wafers with an in line four point probe. This Test Method describes a procedure that enables inter laboratory comparisons of the room temperature resistivity of silicon wafers. The precision that can be expected depends on both the resistivity of the wafer and on the homogeneity of the wafer. Round robin tests have been conducted to establish the expected precision for measurements