TEL Tokyo Electron 5087-400486-15 Valve Assembly DEV.SOLUTION1 Lithius Working Integrated Power Designs Part No:

Integrated Power Designs Part No: SRW-65-2201

Inventory # 13181

Main Output: 230VAC/6A 24VDC/6A

img{max-width:100%} DIP EH0111(D)-7 Power Supply PCB EH0111 TEL Tokyo Electron Lithius Working Spare

Inventory # A-18386

TEL Tokyo Electron 5087-400486-15 Valve Assembly DEV.SOLUTION1 Lithius Working Integrated Power Designs Part No:TEL Tokyo Electron 5087 400486 15 Valve Assembly DEV. SOLUTION1 Lithius Working Inventory # A 18865 Part No: 5087 400486 15 Model No: VALVE ASSY (AMF) DEV. SOLUTION1 Develop Process Station, DEV ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Assembly Part No: 5087 400486 15 VALVE ASSY(AMF) 5004 100010 11 JOINT (509510063511) 1 5010 201961 12 BASE(AMF) 1 5010 402583 11 COVER 1 5010 403084 11 PLATE 1 027 002206 1 O RING