E19000 - SEMI E190 - Specification for Equipment Data Publication (EDP) Revision:SEMI E190-1124 - Current コンベヤレール （2）

コンベヤレール　（2）

000 defects per cm2

) versions of the SMIF port

Detailed information on the method is found in ASTM G48

一般条項

E19000 - SEMI E190 - Specification for Equipment Data Publication (EDP) Revision:SEMI E190-1124 - Current コンベヤレール （2）NOTICE: By purchasing this download, you will receive the Primary Standard and the Subordinate Standard. 1 Purpose 1. 1 The purpose of this Specification is to provide a framework to equipment suppliers on how equipment data is categorized for specific component types and the minimum set of data required for that component type. 2 Scope 2. 1 This Specification defines equipment data concepts, shareable and nonshareable data concepts and category