F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 SEMI C20-0213 (technical revision)

SEMI C20-0213 (technical revision)

port converters and other components for 1

Equipment users require the ability to track equipment performance without dependence on user input to eliminate inaccuracies due to incorrect or untimely input from the user

Producers and users of the silicon wafers and reticles used in semiconductor manufacturing will also find it useful

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F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 SEMI C20-0213 (technical revision)This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment. Since EFFU is an assembly of particle filter, fan, and motor, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance. This Test Method defines an evaluation