E15700 - SEMI E157 - Specification for Module and Substrate Process Tracking StdPbc-1211 and measurement techniques are described

and measurement techniques are described in this Standard

It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources

Test Method 2 describes how to:

Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1

providing guidance on managing different aspects of electrostatic risk under a wide range of conditions

E15700 - SEMI E157 - Specification for Module and Substrate Process Tracking StdPbc-1211 and measurement techniques are described* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1