MF156900 - SEMI MF1569 - Guide for Generation of Consensus Reference Materials for Semiconductor Technology Revision:SEMI MF1569-94 (Reapproved 1999) - Superseded SEMI E33 — Specification for

SEMI E33 — Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility

and Safety Guideline for Manufacturing Equipment Decontamination

02 grade oxygen bulk supply gas

This Document accomplishes this by defining an operational model for AMHS SEM equipment as viewed by a factory automation controller (Host)

SEMI 3D4-0924 (technical revision)

MF156900 - SEMI MF1569 - Guide for Generation of Consensus Reference Materials for Semiconductor Technology Revision:SEMI MF1569-94 (Reapproved 1999) - Superseded SEMI E33 — Specification forThis Guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology. The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with ASTM E691. It is assumed for the purposes of this Guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef.