C00300 - SEMI C3 - ガスの仕様 Revision:SEMI C3-0812 - Superseded Potential methods for abating emissions

Potential methods for abating emissions of gaseous and particulate contaminants exhausted from semiconductor manufacturing operations at "End-of-Pipe"

and setting of test conditions

·    相關文件

SEMI E128-0706 (technical revision)

This specification was technically approved by the Global Flat Panel Display – Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee

C00300 - SEMI C3 - ガスの仕様 Revision:SEMI C3-0812 - Superseded Potential methods for abating emissionsglobal Gases Technical Committee2012618global Audits and Reviews Subcommittee20128www. semiviews. org www. semi. org198119996 The Gases Technical Committee SEMI1979 SEMI SEMI C3 Referenced SEMI Standards None.