P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-1111 - Inactive In the monocrystalline form one

In the monocrystalline form one crystallographic orientation describes the whole wafer and in the multicrystalline case there is more than one crystallographic orientation present

SEMI E113-0724 (complete rewrite)

SEMI D44 — Specification for Reference Position of Single Substrate for Handling Off On Tool

This Standard was technically approved by the Flat Panel Display – Color Global Technical Committee

これらスタンダードは，プロセスツールポートに関する機械的特徴について規定し，また，ツールの前面ないし表面の特徴についても規定する。これら特徴は，特定の機能のためであるが，特定機能のための設計要求事項を定めるものではない。このインタフェース要求事項は普遍的なものであり，ある特定の搬送様式を奨励することを避けている。したがって，プロセスツールポートと，コンベヤのような連続した直接

P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-1111 - Inactive In the monocrystalline form oneThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards