E05411 - SEMI E54.11 - エンドポイントデバイスのための特定デバイスモデル Revision:SEMI E54.11-1106 (Reapproved 1211) - Superseded 2 — Specification for SECS

2 — Specification for SECS II Protocol for Substrate Mapping

The intention of this Document is to define a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions

health and safety (EH&S) issues associated with their use

For measurement

This Document provides basic interface requirements for automated substrate handling

E05411 - SEMI E54.11 - エンドポイントデバイスのための特定デバイスモデル Revision:SEMI E54.11-1106 (Reapproved 1211) - Superseded 2 — Specification for SECSglobal Information & Control Technical Committee2011912global Audits and Reviews Subcommittee201112www. semiviews. org www. semi. org2001200611 SEMI E54 : SEMI EPD Referenced SEMI Standards SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E54 Sensor Actuator Network Standard SEMI E54. 1 Standard for Sensor Actuator Network Common Device Model