TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working I36-454632-A-01

I36-454632-A-01

Made in the USA This Genus 41874-00 Remote CPU PCB is used working surplus

TEL Tokyo Electron Part No: 3Z80-000653-V2

Part No: CB700S-1-20

71791 Interface Relay PCB Card SCB XL 830 DualBeam Used

TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working I36-454632-A-01TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Model No: CPL Chilling Hot Plate Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components Komatsu Part No: 20001870, RCC 300 Omron Part No: E3X DA11 N (Qty. 2) TEL PCB Part No: HTE MC1 B 12, TMB2001, BOARD,CONN HPI #01 Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087