E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0612) - Superseded 3-1016 (Reapproved 0225)

3-1016 (Reapproved 0225)

This Standard applies to only the intermediate container

The scope of this Guide is limited to providing recommended methods of measurement and guidance for the maximum recommended level of static charge on all facility surfaces including:

SEMI G71-0996 (first published)

11-0316 (Reapproved 0721)

E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0612) - Superseded 3-1016 (Reapproved 0225)This Standard provides a means for independent manufacturers to produce equipment and or hosts which can be connected without requiring specific knowledge of each other. The SECS I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and