F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 專門用語

專門用語

This reference Document is intended to outline for the user the common systems configurations

Where an analytical procedure different from that provided is substituted by a supplier or user

SEMI MF673-1105 (Reapproved 0611)

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F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 專門用語The purpose of this document is to provide a guide for the design, fabrication, and operation of secondarily contained distribution piping for hazardous production material (HPM) gases. This guide covers the general requirements for hazardous production material distribution piping in those industries that are included under the H 6 Classification of the Uniform Building Code, or Articles 51 or 80 of the Uniform Fire Code, or of other applicable local