E15100 - SEMI E151 - Guide for Understanding Data Quality StdPbc-0418 10-0600 (Reapproved 1106)

10-0600 (Reapproved 1106)

this should be regarded as an example of an EES item that has been studied in depth and which is being used for illustrative purposes

SEMI E30-95 (technical revision)

• Arsine (AsH3)

SEMI E70-1213 (technical revision)

E15100 - SEMI E151 - Guide for Understanding Data Quality StdPbc-0418 10-0600 (Reapproved 1106)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in May 2017; originally published March 2009; previously published December 2011. The purpose of this Guide is to provide common terminology and definitions that can be used when addressing the