F02100 - SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments Revision:SEMI F21-1016 - Current SEMI M54 — Guide for

SEMI M54 — Guide for Semi-Insulating (SI) GaAs Material Parameters

and dead band of a thermal mass flow controller (MFC)

elongation

本文書は，サーマル・マスフローコントローラがその産業に特有のEMIレベルに置かれた時，機能特性を保持するか否かを評価するために使用することができる要求事項および試験方法を述べる。試験方法は，コントローラがEMIに曝されたときの輻射感受性（RS）および伝導感受性（CS）の両方を記述する。電磁感受性の要求条件はMIL-STD-461CおよびSAMA PMC-33

odorless and tasteless

F02100 - SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments Revision:SEMI F21-1016 - Current SEMI M54 — Guide forThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in October 2016; originally published in 1995; previously published November 2002. NOTICE: This Document was completely rewritten in 2016. The purpose of this Standard is to classify microelectronics clean