E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 注意: 本文書は，編集上の修正を伴い，再承認された。

注意: 本文書は，編集上の修正を伴い，再承認された。

SEMI E30-1103E (editorial revision)

It includes a specific processing state model as the basis for all equipment behavior of this class

This Test Method is an adaptation of ASTM G150

including design

E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 注意: 本文書は，編集上の修正を伴い，再承認された。This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications