F06900 - SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems StdPbc-1020 1 The scope of the

1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link

but deals with material aspects only

the industry

2  The Guide describes metrology techniques that are applicable to both temporary and permanently BWSs

a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data

F06900 - SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems StdPbc-1020 1 The scope of theThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www. semiviews. org and www. semi. org in December 2013; originally published March 2002; previously published July 2008. E This Standard was editorially modified in October 2017. A change was made to correct a nonconforming title per the Procedure