S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン StdPbc-0312 optical housings) by means of

optical housings) by means of an ARS

The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description

Altogether

本文書は，半導体製造装置サプライヤが，装置排気換気システムを一般的な一連の性能基準に基づいて設計するのを支援するとともに，ユーザやサプライヤが装置システムに対する排気換気要件を理解する手助けとなることを意図している。設計仕様を確立することは意図していない。

The inductance in this Standard is limited to that of internal traces only and does not contain the portions contributed by the exposed areas such as pins and wires

S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン StdPbc-0312 optical housings) by means ofNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SME 8 Referenced SEMI Standards (purchase separately) SEMI F5 Guide for Gaseous Effluent Handling SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S14 Safety Guidelines for Fire Risk