MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display an automated approach to fabrication

an automated approach to fabrication of suitable test structures using standard tools available in modern wafer fabs

Therefore means are required to uniquely define the measurement parameters

マスフローデバイスで使用される際のガスを順番に並べた参照表となる，半導体産業で使用されるガスに番号を付けた表を提供すること。この表あるいはリストはデジタルマスフローデバイスの製作および使用を簡単にする。

SEMI S2-1016a (delayed revision)

2  Selection of appropriate certified depositions of reference spheres for SSIS calibration

MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display an automated approach to fabrication1 Purpose 1. 1 Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interaction with the external environment. While there is a wide range of MEMS devices, a fairly common need is for packaging that allows movement of some of the internal subcomponents of the device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected