D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdTpc-Flat Panel Display SEMI F38 — Test Method

SEMI F38 — Test Method for Efficiency Qualification of Point-of-Use Gas Filters

SEMI D3 — Quality Area of FPD Substrates

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies

NOTICE: This Document was balloted and approved for withdrawal in 2008

This Standard is intended to set an appropriate level of specification that places minimal limits on supplier innovation while ensuring opportunities for users to be globally (though possibly not locally) efficient with equipment volumes

D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdTpc-Flat Panel Display SEMI F38 — Test MethodPlastic films substrates for flexible displays change their dimensions by temperature and humidity. Also their dimensions will change by time after heat treatment, water treatment, etc. This Standard provides procedures for the measurement environmental condition to measure dimensions of plastic films substrates. This Standard provides guidance for measuring dimensions of plastic films substrates for electronic devices. Referenced SEMI Standards