E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Revision:SEMI E74-0301 - Superseded The final goal of the

The final goal of the Standard is to realize the traceability of semiconductor

1-1107 (technical revision)

1  Counterfeiting is a serious and growing problem in the worldwide industry

This Classification is to be used in the specification of semiconductor clean environments (including process tool environments) and of contamination control and measurement equipment performance

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E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Revision:SEMI E74-0301 - Superseded The final goal of theNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this