C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 StdPbc-1211 SEMI F40 — Practice For

SEMI F40 — Practice For Preparing Liquid Chemical Distribution Components for Chemical Testing

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SEMI E28-92 (first published)

The radial resistivity variation of bulk semiconductor material is an important materials acceptance requirement for semiconductor device fabrication and is also used for quality control purposes

This Standard is intended to set an appropriate level of specification that places minimal limits on supplier innovation while ensuring opportunities for users to be globally (though possibly not locally) efficient with equipment volumes

C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 StdPbc-1211 SEMI F40 — Practice Forglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20002 (SiH4) Referenced SEMI Standards None.