E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids two or more different PID
$115.50
Description
two or more different PID test specimens (hereafter: test specimens) can be compared quantitatively with respect to their PID-s sensitivity
There are other metrics
6-0421 (technical revision)
as recommended by this Guide
SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids two or more different PIDNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Subordinate Standards (included): SEMI E90. 1 0312 Specification for SECS II Protocol Substrate Tracking Referenced SEMI Standards (purchase separately) SEMI E30 Specification for the Generic Model for Communications and Control of
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