TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius Working Model No: Vacuum Chamber

Model No: Vacuum Chamber

AMAT Applied Materials Part No: 0190-08517 This item is working surplus

Inventory # K-7837

Model No: 4S013-373-2

This Matrox IM-CLD/AT/N is used working surplus

TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius Working Model No: Vacuum ChamberTEL Tokyo Electron 51161 802 001 Interface Block Robot IRAM Lithius Working Part No: 51161 802 001 Model No: Interface Block Robotic Arm Main IRAM Fork is not included Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M SSB020FN502 NSK Linear Stage Slide Part No: XY HRS025ZRS202 Parts List Assembly Part No: 5087 403668 12, IRAM (LITHIUS IPL), X AXIS 5080 192746 11: BASE,FORK