M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers StdPbc-0714 4-0698 (Reapproved 0615) - Test

4-0698 (Reapproved 0615) - Test Method for Measurement of Water Absorption of Leadframe Tape

SEMI MF671-0312 (Reapproved 1023)

SEMI C36 — Specifications for Phosphoric Acid

1  The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards

Sheet resistance is a primary quantity for characterization

M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers StdPbc-0714 4-0698 (Reapproved 0615) - TestThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1978; previously published November 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. These specifications cover requirements for monocrystalline silicon epitaxial