M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display and other methods of measuring

and other methods of measuring electrostatic parameters

本スタンダードは，global Flat Panel Display – Mask Committeeで技術的に承認されている。現版は2006年5月16日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年6月にwww

and optical interferometric measurement methods

SEMI C36-1106 (technical revision)

and adds Prober Job state model to GEM Standard requirements and capabilities

M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display and other methods of measuringThis Guide incorporates the following methodologies: Standardized scan patterns for both local and full area surface characterization, A set of roughness abbreviations that describe measurement conditions in a short hand code, and Reference test methodologies for three generic types of roughness measuring instruments. These general categories may include, but are not limited to: Profilometers AFM and other scanning probe microscopes; optical