E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C SEMI E37-0222 (technical revision)

SEMI E37-0222 (technical revision)

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

Typical examples include dips

Appropriate information is summarized in § 5

and dead band of a thermal mass flow controller (MFC)

E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C SEMI E37-0222 (technical revision)This Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components