S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded Where material contains other material

Where material contains other material (such as carriers containing wafers)

この文書は，レチクルおよびその他のEESアイテムを使用，あるいは生産する人員へのガイドとして，装置の設計からテストまでの期間に装置製造業者のために使用することが出来る。

This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment

This Guide describes the engineering and component requirements for a UPW system used in semiconductor manufacturing

ロード，アンロード状態

S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded Where material contains other materialFPD This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www. semi. org in October 2006. Originally published October 2003. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 7. 2. 3. This safety guideline identifies preferred