M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdVol-Process Chemicals 1 The scope of the

1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link

• edge roundness

2-0617 (complete rewrite)

which is used in the semiconductor industry for the deposition of tantalum nitride based layers by atomic layer deposition

SEMI E87-0705 (technical revision)

M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdVol-Process Chemicals 1 The scope of theThis Practice covers a methodology to determine the costs associated with misclassification of product due to variability and bias of measurement equipment. These costs are associated with failing product that conforms with specifications and passing product that does not conform with specifications. This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user.