E05100 - SEMI E51 - Guide for Typical Facilities Services and Termination Matrix Revision:SEMI E51-0200 - Inactive The purpose of this Document

The purpose of this Document is to provide specification for carbon tetrafluoride (CF4) that is used in the semiconductor industry

SEMI E94-0200 (first published)

SEMI E49-0304 (designation update)

The objective of this Document is to establish standard guidelines for activities specific to the final assembly and packaging at the supplier’s facility

The user should investigate metrology suppliers’ current capabilities

E05100 - SEMI E51 - Guide for Typical Facilities Services and Termination Matrix Revision:SEMI E51-0200 - Inactive The purpose of this DocumentNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The objectives of this Guide are to ensure a timely and cost effective tool installation with minimum impact on the existing customer facilities, systems, and services, and to insure that the quality of