E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 • Equipment and load port

• Equipment and load port access mode switching

000 defects per cm2

5-1104 (technical revision)

FPDガラス基板をある枚数収納するカセットに適用される。選択された用語，定義並びに仕様概略が含まれている。枚葉用ガラス基板カセットの仕様は他文書で記述される予定である。

This standard was technically approved by the global Flat Panel Display – Factory Automation Committee

E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 • Equipment and load portThis standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. NOTICE: This document was